Chemical Blending and Delivery Systems
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ChemFlow’s mid-size CFB series precision blending systems provide
extremely accurate and repeatable on-site blending of slurries and chemicals
over a wide range of mixing ratios.
ChemFlow’s patented volumetric blending process, in combination
with our tank design, makes precision volumetric blending and delivery
simple. The CFB series unit provides 2 GPM blending of up to 3 chemicals
and delivers high purity or CMP chemicals to a single or multiple tools.
It utilizes our patented "U-tube” and an internal 30-gallon
storage tank. Pneumatic valves are the only moving parts. These features
provide many advantages over the competition.
system consists of two sub-units, the Blending Unit and the Delivery
Unit. The Blending Unit accurately combines set quantities of up to
3 chemicals to achieve the desired slurry or chemical blend. The system
mixes the chemicals together by first filling individual patented volumetric
measuring vessels. Chemical is introduced into each vessel until the
desired volume is reached. The volume is determined by using our patented
“U-Tube” technology. This technique allows for highly accurate
and repetitive measurements. Once the vessels are filled, the contents
are gravity transferred into the mixing vessel. The result is an accurately
mixed slurry or chemical. The blended slurry or chemical is then transferred
to the Delivery Unit of the system by pressure.
The Delivery Unit receives the mixed slurry or chemical. It is then
gravity transferred from the internal tank into the delivery vessels.
From there, it is pressure transferred into a distribution loop.
are many methods available to perform blending of slurries and chemicals.
Current industry standards utilize metering pumps, scales, sensors,
or a combination of the above, but these methods fail to maintain precision
over time. The inherent problems with these methods is that they add
layers of complexity to the blending and delivery processes. This translates
into costly downtime due to improperly mixed batches, discarded material
due to shelf-life, additional labor hours required for calibration,
and/or preventive/corrective maintenance.
The CFB system is extremely easy to operate and takes advantage of the
physical properties of liquid and gravity. It accurately and repeatedly
fills mixing vessels with precise volumes of liquid. The “U-Tube”
design acts as a simple side flow gravity drain that naturally monitors
the level within the mixing vessel. Once the U-tube drain is set, the
volume obtained within the mixing vessel is precisely repeatable.
Innovative Blending Technology - Patented "U-Tube" Technology
design eliminates particle agglomeration issues
ratios up to 1000:1 - with chemical levels as low as 5cc's
Pressure Flow Delivery Design
"Pot-Life" issues by blending only as needed
slurry settling in lines by making frequent small batches
small batches reduces chemical waste
direct sensor contact with chemicals
and Delivery monitored by visual LCD touch screen
chemical components are visible and accessible for ease of troubleshooting
are the only moving parts. No pumps, scales, or re-calibration is
required for blending
system is designed with safety in mind
Chemical and Slurries
of set point
Time Analytical (Optional)
pH / ORP, Density
x 42"(D) x 78"(H)