UPW 1/2" Flare fitting at 40 psig & 19 LPM
UPW Return 1/2" Flare fitting at 40 psig & 19 LPM
Nitrogen 1/2" VCR Male at 80-125 psig 5 scfm
Drain 3/4" NPT
Scrubbed Exhaust 4" SCH 40 NPP - 2" Stub at 0.5" WC & 150 scfm
Influent Chemical Loop Teflon PFA 3/4" Flare fitting at 10 -20 psig & 4 LPM
Influent Chemical Dual Containment 2" SCH 40 NPP - 2" Stub
Primary Distribution Loop Supply and Return Teflon PFA 3/4" Flare fitting at 0 - 60 psig & 8 LPM
Dual Containment Distribution Loop Supply and Return 2" SCH 40 NPP - 2" Stub
Electrical 3/4" Sealtight - 120 vac; 10amps
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CFB Series
Chemical Blending and Delivery Systems

4Data Sheets (237k) PDF Format | 4Detail View & Features | 4BlendFlow Process


ChemFlow’s mid-size CFB series precision blending systems provide extremely accurate and repeatable on-site blending of slurries and chemicals over a wide range of mixing ratios.

ChemFlow’s patented volumetric blending process, in combination with our tank design, makes precision volumetric blending and delivery simple. The CFB series unit provides 2 GPM blending of up to 3 chemicals and delivers high purity or CMP chemicals to a single or multiple tools. It utilizes our patented "U-tube” and an internal 30-gallon storage tank. Pneumatic valves are the only moving parts. These features provide many advantages over the competition.

The CFB system consists of two sub-units, the Blending Unit and the Delivery Unit. The Blending Unit accurately combines set quantities of up to 3 chemicals to achieve the desired slurry or chemical blend. The system mixes the chemicals together by first filling individual patented volumetric measuring vessels. Chemical is introduced into each vessel until the desired volume is reached. The volume is determined by using our patented “U-Tube” technology. This technique allows for highly accurate and repetitive measurements. Once the vessels are filled, the contents are gravity transferred into the mixing vessel. The result is an accurately mixed slurry or chemical. The blended slurry or chemical is then transferred to the Delivery Unit of the system by pressure.

The Delivery Unit receives the mixed slurry or chemical. It is then gravity transferred from the internal tank into the delivery vessels. From there, it is pressure transferred into a distribution loop.

There are many methods available to perform blending of slurries and chemicals. Current industry standards utilize metering pumps, scales, sensors, or a combination of the above, but these methods fail to maintain precision over time. The inherent problems with these methods is that they add layers of complexity to the blending and delivery processes. This translates into costly downtime due to improperly mixed batches, discarded material due to shelf-life, additional labor hours required for calibration, and/or preventive/corrective maintenance.

The CFB system is extremely easy to operate and takes advantage of the physical properties of liquid and gravity. It accurately and repeatedly fills mixing vessels with precise volumes of liquid. The “U-Tube” design acts as a simple side flow gravity drain that naturally monitors the level within the mixing vessel. Once the U-tube drain is set, the volume obtained within the mixing vessel is precisely repeatable.

Features:

  • ChemFlow's Innovative Blending Technology - Patented "U-Tube" Technology
  • Pipe-Tank design eliminates particle agglomeration issues
  • Blending ratios up to 1000:1 - with chemical levels as low as 5cc's
  • Constant Pressure Flow Delivery Design
  • Controls "Pot-Life" issues by blending only as needed
  • Reduces slurry settling in lines by making frequent small batches
  • Blending small batches reduces chemical waste
  • No direct sensor contact with chemicals
  • Blending and Delivery monitored by visual LCD touch screen
  • All chemical components are visible and accessible for ease of troubleshooting
  • Valves are the only moving parts. No pumps, scales, or re-calibration is required for blending
  • Uses Off-the-Shelf components
  • The system is designed with safety in mind
  • SEMI S2-93A Compliant

Specifications:

CFB Series
Flow
8 LPM
Applications
All Chemical and Slurries
No. of Chemicals
Up to 3
Repeatablility
+/-0.1% of set point
Real Time Analytical (Optional)
Pressure, pH / ORP, Density
Module Dimensions 42"(W) x 42"(D) x 78"(H)

Facility Requirements:

 

CFB Series
ChemFlow Systems


Click on image for Detail View & Features

4Data Sheets (237k) PDF Format
4BlendFlow Process