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CFCs Series
Small Footprint
Chemical Blending and Delivery Systems
4 Datasheets (240k) PDF Format | 4Detail View & Features | 4BlendFlow Process

ChemFlow’s Point-of-Use (POU) CFCs series precision dilution / blending and delivery system provides extremely accurate and repeatable on-site blending or stirring of slurries over a wide range of mixing ratios. Its small footprint, only 24" wide and 20" deep, is key to the design.

ChemFlow’s patented volumetric blending process, in combination with our pipe-tank design, makes precision volumetric blending and delivery simple.

The CFCs series provides 2 LPM dilution and delivery of high purity CMP chemicals to a single or multiple end users through the use of pressure vessel delivery. It has adjustable PFA sight-tubes and a 4-gallon blend tank. Pneumatic valves and the “ChemFlow ChemPulse” blending process are the only moving parts employed in the CFCs. This simple reliable system provides many advantages over the competition.

The CFCs unit consists of two sub-units, a dilution/blending unit and a pressurized delivery unit. The blending unit accurately combines known quantity of chemicals to form and blend the desired slurry or chemical. The ChemFlow system mixes the desired slurry or chemicals together by first filling the preset measured vessels. The volume is determined by setting the patented
“U-Tube” on each vessel. This patented technology allows for highly accurate repetitive volumetric measurements. Once the vessels are filled with the desired quantity of chemical, the contents of each vessel are gravity transferred into the mixing vessel. The chemicals are introduced into the 4-gallon blend vessel where the “ChemFlow ChemPulse” blender gently mixes the chemicals on entry. The result is an accurately mixed volume of slurry or chemical. From this point the slurry or chemicals are transferred to the delivery unit of the system by gentle gravity flow.

The delivery system transfers the slurry or chemicals to the POU from one of the two vessels. It is then pressurized and transferred to the POU or feedback loop under constant pressure and flow.

There are many methods available to perform blending of slurries and chemicals. Current industry standards utilize metering pumps, scales, sensors, or a combination of the above, but these methods fail to maintain precision blending over time. The inherent problem with these systems are that they add a layer of complexity to the blending and delivery processes. This translates into costly downtime due to improperly mixed batches, discarded material due to shelf-life, additional labor required for calibrations, and,or preventive/corrective maintenance. The CFCs mixes small batches for what the need is, eliminating waste.

The ChemFlow CFCs system is extremely easy to operate. It is self-monitoring and contains few moving components. The system takes advantage of the physical properties of liquids and gravity to accurately and repeatedly fill the blending vessel with precise volumes of liquid. The U-tube design is simple, self-cleaning, and with the gravity overflow drain, it naturally monitors the level within the vessels with precise accuracy. Once the u-tube is set and locked in, the volume obtained within the mixing vessel is precisely repeatable. The slurry or chemical is then delivered to the POU or loop under constant pressure and flow.

Features:

  • ChemFlow's Innovative Blending Technology - Patented "U-Tube" Technology, "ChemFlow ChemPulse" blending process
  • Pipe-Tank design eliminates particle agglomerations issues
  • Blending ratios up to 1000:1 - with chemical levels as low as 5cc's
  • Reduce slurry settling in Lines by making frequent small batches
  • Constant Pressure Flow Delivery Design
  • Controls "Pot-Life" issues by blending only as needed
  • Reduce Slurry settling in lines from processing frequent small batches
  • Reduce chemical waste from small batch mixing process
  • No direct sensor contact with chemical
  • Blending and Delivery monitored by visual LCD touch screen
  • Uses Off-the-Shelf standard of industrial components
  • All chemical components are visible and accessible for ease of troubleshooting
  • Valves are the only moving parts. No pumps, scales, or re-calibration is required
  • Small Footprint Design
  • Extremely reliable and easy to use and System is designed with safety in mind
  • SEMI S2-93A compliant

Specifications:

CFCs Series
1 Chemical System
2 Chemical System
Flow
2.5 LPM
2.5 LPM
Applications
All Chemical and Slurries
All Chemical and Slurries
Num. of Chemicals
1
2
Repeatablility
+/-0.1% of Set point
+/-0.1% of Set point
Real Time Analytical (Optional)
Pressure, pH / ORP, Density
Pressure, pH / ORP, Density
Module Dimensions
24"(W) x 20"(D) x 84"(H)
24"(W) x 20"(D) x 84"(H)

Facility Requirements:

UPW Supply 1/2" Flare fitting at 40 psig
UPW Return 1/2" Flare fitting at 40 psig
Nitrogen 1/4" VCR Male at 80-125 psig 5 scfm
Drain 3/4" FNPT - Free flowing to industrial waste
Scrubbed Exhaust 2" SCH 40 Natural Poly pipe - 2" Stub at 0.5" WC & 50 scfm
Influent Chemical Loop Teflon PFA 1/2" Flare fitting at 10 -20 psig & 1 GPM
Influent Chemical Dual Containment 2" SCH 40 Natural Poly pipe - 2" Stub
Primary Distribution Loop Supply and Return Teflon PFA 1/2" Flare fitting at 0 - 60 psig
Dual Containment Distribution Loop Supply and Return 2" SCH 40 Natural Poly pipe- 2" Stub
Electrical 3/4" Seal-tight - 120 vac; 10amps

System Comparisons:

Item #
Criteria Description
ChemFlow System

Pressure/
Vacuum
System

Pump System
1
Precision blending relying on pumps, scales or system intrusive level sensors
No
Yes

Yes

2
Frequent blending calibration / adjustments needed
No
Yes
Yes
3
Potential CMP slurry particle agglomeration problems (i.e. tank design)
No
Yes
Yes
4
Slurry foaming problems
No
Yes
No
5
Level sensors in contact with chemical product
No
Yes
Yes
6
Air bubbles developed in delivery loop due to non-functional level sensors
No
Yes
No
7
Frequent valve cycling
No
Yes
Yes
8
Intensive preventive maintenance required
No
Yes
Yes
9
Ergonomic issues and problems
No
No
Yes

 

 

 

 

 

 

 

 

 

 

CFCs Series
Small Footprint

ChemFlow System's


Click on image for Detail View & Features

4 Datasheets (240k) PDF Format
4Detail View & Features
4BlendFlow Process