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CFC Series
Chemical Blending and Delivery Systems
4Data Sheets (231k) PDF Format | 4Detail View & Features | 4BlendFlow Process

ChemFlow’s Point-of-Use (POU) CFC series precision blending systems provide extremely accurate and repeatable on-site blending of slurries and chemicals over a wide range of mixing ratios.

ChemFlow’s patented volumetric blending process, in combination with our pipe-tank design, makes precision volumetric blending and delivery simple. The CFC series unit provides 2 LPM blending and delivery for high purity or CMP chemicals to a single or multiple end users. It utilizes our patented adjustable overflow "U-tubes" and a 3-gallon pipetank. Pneumatic valves are the only moving parts employed.
These features provide many advantages over the competition.

The CFC system consists of two sub-units, the Blending Unit and the Delivery Unit.
The Blending Unit accurately combines set quantities of up to 3 chemicals to achieve the desired slurry or chemical blend. The ChemFlow system mixes slurry or chemicals together by first filling the preset measured vessels. The volume is determined by using our patented "U-tube" technology. This patented technology allows for highly accurate and repetitive volumetric measurements. Once all vessels are filled, the contents of each vessel are gravity transferred into the blending vessel. The result is an accurately mixed slurry or chemical. The blended slurry or chemical is then transferred to the Delivery Unit of the system by pressure.

The Delivery Unit receives the mixed slurry or chemical into the main 3-gallon pipe-vessel. It is then pressure transferred into a distribution loop to the end user. The slurry or chemical is delivered to the end user under constant pressure and flow.

There are many methods available to perform blending of slurries and chemicals. Current industry standards utilize metering pumps, scales, sensors, or a combination of the above, but these methods fail to maintain precision blending over time. The inherent problem with these systems are that they add a layer of complexity to the blending and delivery processes. This translates into costly downtime due to improperly mixed batches, discarded material due to shelf-life, additional labor required for calibrations, and,or preventive/corrective maintenance.

The ChemFlow CFC system is extremely easy to operate. It is self-monitoring, and contains few moving components. The system takes advantage of the physical properties of liquids and gravity to accurately and repeatedly fill mixing vessels with precise volumes of liquid. The adjustable overflow “U-tube” acts as a simple side flow gravity drain that naturally monitors the level within the mixing vessel. Once the U-tube drain is set, the volume obtained within the mixing vessel is precisely repeatable.


  • ChemFlow's Innovative Blending Technology - Patented "U-Tube" Technology
  • Pipe-Tank design eliminates particle agglomerations issues
  • Blending ratios up to 1000:1 - with chemical levels as low as 5cc's
  • Reduce slurry settling in Lines by making frequent small batches
  • Constant Pressure Flow Delivery Design
  • Controls "Pot-Life" issues by blending only as needed
  • Reduce Slurry settling in lines from processing frequent small batches
  • Reduce chemical waste from small batch mixing process
  • No direct sensor contact with chemicals
  • Blending and Delivery monitored by visual LCD touch screen
  • Uses off-the-shelf standard industrial components
  • All chemical components are visible and accessible for ease of troubleshooting
  • Valves are the only moving parts. No pumps, scales, or re-calibration is required for blending
  • Extremely reliable and easy to use. System is designed with safety in mind
  • SEMI S2-93A compliant


CFC Series
All Chemical and Slurries
No. of Chemicals
Up to 3
+/-0.1% of Set point
Real Time Analytical (Optional)
Pressure, pH / ORP, Density
Module Dimensions
45"(W) x 16½"(D) x 73½"(H)
Safety Certification

Facility Requirements:

UPW Supply 1/2" Flare fitting at 40 psig & 19 LPM
UPW Return 1/2" Flare fitting at 40 psig & 19 LPM
Nitrogen 1/4" VCR Male at 80-125 psig 5 scfm
Drain 3/4" NPT - Free flow to industrial waste
Scrubbed Exhaust 2" SCH 40 NPP - 2" Stub at 0.5" WC & 50 scfm
Influent Chemicals Loop Teflon PFA 1/2" Flare fitting at 10 -20 psig & 4 LPM
Influent Chemicals Dual Containment 2" SCH 40 NPP - 2" Stub
Primary Distribution Loop Supply and Return Teflon PFA 1/2" Flare fitting at 0 - 60 psig & 8 LPM
Dual Containment Distribution Loop Supply and Return 2" SCH 40 NPP - 2" Stub
Electrical 3/4" Sealtight - 120 vac; 10amps
CFC Series
ChemFlow Systems

Click on image for Detail View & Features

4Data Sheets (231k) PDF Format
4Detail View & Features
4BlendFlow Process