CMP Slurry and Chemical Blending / Delivery Systems
Designed with our Patended U-Tube Technology and
Gravity Flow Techinque. No Pumps or Scales are Used.
CFCs Series (2 LPM)
(One Gallon Bottle Chemical Transfer)
CFB Series (2 GPM Blending
and Delivery System)
ChemFlow's CFB series is
a 2 GPM blending and delivery system. CFB provides extremely accurate
blending and delivery of high purity or CMP chemicals to a single or
multiple points of use (POU). The patented volumetric blending process,
in combination with the pipe tank vessel design, makes repeatable precision
volumetric blending and delivery simple.
CFC Series (2 LPM Blending
and Delivery System)
ChemFlow's Point of Use (POU) CFC series achieves accurate volumetric
measurements with the use of our patented U-Tube technology. Designed
with a 3 gallon pipe tank, this system provides 2 LPM blending and delivery
of high purity or CMP chemicals to a single or muliple points of use.
CFCs Series (2
LPM Small Footprint Blending and Delivery System)
ChemFlow’s Point-of-Use (POU) CFCs series precision blending
and delivery system provides extremely accurate and repeatable on-site
blending over a wide range of mixing ratios. In addition, the system
has the capablility of intermitant stirring of chemicals or slurries
to eliminate settling or separation.
The CFCs series provides 2 LPM blending and delivery of high purity
CMP chemicals to a single or multiple tools through the use pressure
vessel delivery. The 4-gallon internal delivery tank can supply the
tool directly or by return loop. Pneumatic valves and the “ChemFlow
ChemPulse” blending system are the only moving parts. Its small
footprint, only 24" wide and 20" deep, is key to the design.
Series (2.5 LPM Small Footprint Blending and Delivery System)
CFC2 series provides 2.5 LPM blend and delivery of high purity CMP chemicals
to a single or multiple tools. It utilizes our patented "U-tube"
technology along with our 3.5-gallon pipe-tank. Pneumatic valves are
the only moving parts employed. More...
CFF (One Gallon Chemical
Safety Chemical Transfer System
The CFF is designed as a cost effective way to safely transfer the contents
of one-gallon containers (chemicals or other liquids) into an internal
storage tank. Once the contents are in the storage tank, the CFF can
transfer and supply these chemicals to a point of use (POU). The design
is ideal to meet the needs of a low volume chemical use operation. It
minimizes the safety risks associated with day-to-day handling and pouring
of chemicals that operators or technicians are exposed to. It reduces
repeated exposure to chemicals (TLV and PEL) and eliminates the number
of times that an operator or technician needs to fill a sink or supply
other processing tools. More...
Portable Pump Unit
ChemFlow’s compact and Portable
Single or Dual Pump Units provide chemical or slurry delivery to the
point of use from a desired location. More...