Precision CMP Slurry and Chemical Blending / Delivery Systems
are Designed with our Patended U-Tube Technology and
Gravity Flow Techinque. No Pumps or Scales are Used.

CFB Series (2 GPM)

CFC Series (2 LPM)

CFCs Series (2 LPM) Small Footprint

CFF Series (One Gallon Bottle Chemical Transfer)

Portable Pump Unit (Chemical Transfer)

CFB Series (2 GPM Blending and Delivery System)
ChemFlow's CFB series is a 2 GPM blending and delivery system. CFB provides extremely accurate blending and delivery of high purity or CMP chemicals to a single or multiple points of use (POU). The patented volumetric blending process, in combination with the pipe tank vessel design, makes repeatable precision volumetric blending and delivery simple. More...

CFC Series (2 LPM Blending and Delivery System)
ChemFlow's Point of Use (POU) CFC series achieves accurate volumetric measurements with the use of our patented U-Tube technology. Designed with a 3 gallon pipe tank, this system provides 2 LPM blending and delivery of high purity or CMP chemicals to a single or muliple points of use. More...

CFCs Series (2 LPM Small Footprint Blending and Delivery System)
ChemFlow’s Point-of-Use (POU) CFCs series precision blending and delivery system provides extremely accurate and repeatable on-site blending over a wide range of mixing ratios. In addition, the system has the capablility of intermitant stirring of chemicals or slurries to eliminate settling or separation.

The CFCs series provides 2 LPM blending and delivery of high purity CMP chemicals to a single or multiple tools through the use pressure vessel delivery. The 4-gallon internal delivery tank can supply the tool directly or by return loop. Pneumatic valves and the “ChemFlow ChemPulse” blending system are the only moving parts. Its small footprint, only 24" wide and 20" deep, is key to the design. More...

CFC2 Series (2.5 LPM Small Footprint Blending and Delivery System)
The CFC2 series provides 2.5 LPM blend and delivery of high purity CMP chemicals to a single or multiple tools. It utilizes our patented "U-tube" technology along with our 3.5-gallon pipe-tank. Pneumatic valves are the only moving parts employed. More...

CFF (One Gallon Chemical Transfer System)
Safety Chemical Transfer System

The CFF is designed as a cost effective way to safely transfer the contents of one-gallon containers (chemicals or other liquids) into an internal storage tank. Once the contents are in the storage tank, the CFF can transfer and supply these chemicals to a point of use (POU). The design is ideal to meet the needs of a low volume chemical use operation. It minimizes the safety risks associated with day-to-day handling and pouring of chemicals that operators or technicians are exposed to. It reduces repeated exposure to chemicals (TLV and PEL) and eliminates the number of times that an operator or technician needs to fill a sink or supply other processing tools. More...

CFP Portable Pump Unit
ChemFlow’s compact and Portable Single or Dual Pump Units provide chemical or slurry delivery to the point of use from a desired location. More...