Frequent Asked Questions

Q1: What techniques are used in mixing process to weigh or measure chemicals for mixing?

We use a simple patented “U-Tube" technique for measuring vessels to set volume for each chemical for mixing. Once the volumes are initially set, no recalibration is required since there are no moving parts to wear over time in the measuring vessels. Our measuring process is unlike other types of systems where frequent volume or weight calibrations are required. We do not use pumps, scales, or sensors to weigh or measure chemicals.

Q2: What is the Mixing Repeatability?

The repeatability of mixing with our “U-tube” technology has achieved better results than any produced by industrial scales, pumps, or sensors. The repeatability remains the same over time. There are no moving parts in the measured vessels except for the adjustable U-Tube.. The mixing repeatability can be easily maintained at or better than 0.1 %.

Q3: What Mixing Ratios are the CFB, CFC, and CFCs capable of?

All systems have a mixing range up to 1000:1. These ratios can be accomplished by the use of various volume vessels, still maintaining small mixing ratios to avoid many problems that are seen when mixing bulk quantities (i.e.; shelf-life, settling, separation, etc.).

Q4: How many number of chemicals can the ChemFlow blending and delivery systems mix?

CFB: up to 3 chemicals
CFC: up to 3 chemicals
CFCs: up to 2 chemicals

We can also customize your blending needs.

Q5: What is so unique about ChemFlow’s patented measuring process?

No moving parts to wear, just the adjustable "U-Tube", and that’s it! That’s why the measured repeatability can be held indefinitely. Cycle to cycle, due to its small volumes, keeps the system free from buildup.

Q6: How is thorough mixing accomplished?

For CMP slurry and other chemical applications, we use a Turbo Mixer, ChemFlow Chem_Pulse mixer, or a static mixer (depending on model) inside the tank for our blend/mixing systems. Mixed slurry or chemical is continuously circulated thru the loop to make sure they are thoroughly mixed. Since we keep the total working volume small, the complete mixing is not a problem.

 

Q7: How does ChemFlow's blending/mixing systems get the chemicals necessary for mixing and how are they controlled?

Chemicals come from a bulk or drum sources. The system’s PLC is set up to open a valve or to start a pump (pneumatic) to allow the fill for each vessel. The bulk supply that is not controlled by our system would need to be at a positive flow to fill. It could fill from a looped chemical supply line as well. In the case of the CFB models, a large volume is necessary (55 gallon drum or bulk) for the continued fill depending on the required total mixed supply. For the CFC, a drum (5 or 55 gallon) or even the bottle transfer unit (CFF) could be the source if the chemicals came in one-gallon bottles. As you know there are many options, depending on your specific needs. Our team can come up with a dependable solution.

Q8: Why is ChemFlow blending/mixing systems superior to other systems in the market, particularly for CMP slurry and Etch chemicals?

• For CMP applications, ChemFlow Systems is the first to implement Pipe-Tank designs to prevent slurry particle agglomeration.
  
• The simple “U-Tube” Technology vessel literally holds mixing repeatability indefinitely. We use no pumps, scales, or sensors that are used in the mixing process.
  
• Our systems can eliminate the worries of mixed chemical “Shelf-Life”.
  
• For Etch chemicals, there are no worries about ratio changes. Once the vessel ratios are set in place, there is no drift, variations, or re-calibrations to be preformed.
  
• No other systems in the market today can address and provide solutions for the following three critical issues: Particle Agglomeration, Mixed Chemical Shelf-Life, or Systems that require frequent re-calibration.
  
• ChemFlow eliminates the use of pumps in it's blending/mixing and delivery processes.

Q9: What type of metrology is used on the blend/mixing systems?

Our systems are designed to let the end user integrate their preference for metrology. There are many options for metrology such as pH meters, particle counter, or other inline sample measurement systems. We could incorporate these features but it could turn out to be a selection that many end users would not prefer. We can build to customers specifications and needs.

Q10: How does one select a ChemFlow model to fill their needs?

· Determine what type of chemical will be used.

· Determine the chemical usage.

· Determine whether chemical mixing is required or not, and the number of chemicals to be mixed.

· Determine if it requires constant circulation or not.

· Contact us. We will do the rest for you.

 

Q11: Why are ChemFlow’s technologies better at controlling CMP slurry particle settling and agglomeration?

Thru the state-of-art system design, ChemFlow’s Blend and Delivery Systems can eliminate particle settling in tanks and supply loops. We use the "Pipe-Tank" design to prevent slurry particle agglomeration and particle settling. We make small batches that are frequent enough to eliminate the chances for slurry to settle in the slurry supply loops.